- Title
- Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor
- Creator
- Bazaei, Ali; Zhu, Yong; Moheimani, Reza; Yuce, Mehmet Rasit
- Relation
- IEEE Sensors Journal Vol. 12, Issue 6, p. 1772-1784
- Publisher Link
- http://dx.doi.org/10.1109/JSEN.2011.2178236
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2012
- Description
- An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.
- Subject
- analytical models; electrothermal position microsensor; nonlinear analysis; thermoelectric microactuators
- Identifier
- http://hdl.handle.net/1959.13/1313278
- Identifier
- uon:22561
- Identifier
- ISSN:1530-437X
- Language
- eng
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